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Hologenix manufactures innovative products for Inspection, Metrology, and Materials Processing for Semiconductor, Solar, MEMS, Biotech, Optics, Industrial, Photonics, LED, and Microelectronics industries.

Hologenix NGS-3500 Automated Nomarski Microscope

NGS-3500 Automated Defect Detection Microscope

The Hologenix Automated Nomarski Microscope is useful for detecting Slip Dislocations and other Defects that occur during many types of Wafer Processes:
  • EPI Oxidation
  • Diffusion Post Implant Annealing, RTP
  • SOI
  • Polishing
  • Strained Silicon
  • Many other Semiconductor applications

Features:

  • 100-200mm and 300mm Versions
  • Automated Slip Line and Defect Detection
  • For Patterned and Un-Patterned Wafers
  • Manual Load (Optional Cassette Load)
  • Based on the Nomarski (DIC) Optics
  • Sophisticated Automatic Defect Detection Software
  • Customized Defect Detection Algorithms Available
  • Economical
   

 



Hologenix Magic Mirror Automated Wafer Surface Inspection System

YIS-200SP-4

 

 

Hologenix Automatic Defect Inspection Software

Automatic Defect Inspection Software

Magic Mirror™ 4 Cassette Automated Wafer Surface Inspection System


With a throughput of 300 wafers per hour for 200mm wafers, the YIS-200SP-4 equipped with rotating tilt stages (RTS) offers an unsurpassed inspection sensitivity for polished and epitaxial wafers.

The proprietary Magic Mirror™ optics inspects the entire wafer surface in real-time and can detect extremely shallow defects in the wafer surface. The Magic Mirror™ offers a vital capability for the qualification of materials and processes used in advanced IC manufacturing where ultra-flat and defect-free wafer surfaces are required.

Applications include the inspection of thermal steps - epitaxy, diffusion and RTP, as well as wafer polishing and CMP. The Magic Mirror™ is an inspection tool that cost effectively provides process characterization information during development and timely troubleshooting during production.

The Hologenix Magic Mirror™ surface inspection systems are available in several different configurations ranging from a simple manual tool to a fully-automated Windows NT based, SECS II GEM compliant, dual cassette, 300mm system.

 

Magic Mirror™ 4 Cassette Automated Wafer Surface Inspection System  

 

This is just a small sample of the products offered by Hologenix.
Please contact your local TCG representative for more information.

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