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Foothill Instruments Web Site


Foothill Instruments manufactures metrology systems for semiconductor, MEMS, optical, and related markets, with measurement ranges up to 500 microns of dielectric film. Measurements of thinned silicon and very thick dielectrics are also routine for Foothill products, which are packaged reliably and with a small footprint.

Foothill Instrument L-2 Film Thickness Metrology System
L-2

Manual tabletop film thickness tool for measuring transparent films of thickness up to 150 µm.

Foothill Instruments L-2 Manual Film Thickness Tool

  • Low cost film thickness metrology system
  • Manual wafer positioning
  • Optional Windows PC
  • Produces no stray white light
  • Optical design eliminates need for focusing
  • Simple maintenance: semiannual lamp change done in minutes with no tools
   

Foothill Instuments KF-10
KF-10

Tabletop film thickness tool for measuring transparent films of thickness up to 160 µm.

 
Foothill Instruments KF-10 Film Thickness Tool
  • Compact footprint with high reliability R - Q stage
  • Generate thickness contour map in less than one minute
  • Internal reference - calibration standard to maintain accuracy
  • Produces no stray white light
  • Optical design eliminates need for focusing
  • Simple maintenance: semiannual lamp change done in minutes
    with no tools
  • 3" to 200 mm stage
  • Also available in manual version (KF-10m)
   

Foothill Instruments KV-300

Foothill Instruments KV-300 Film Thickness Tool with vision

  • Compact footprint with high reliability R - Q stage
  • Generate thickness contour map in less than one minute
  • Internal reference - calibration standard to maintain accuracy
  • Produces no stray white light
  • Optical design eliminates need for focusing
  • Simple maintenance: semiannual lamp change done in minutes
Configurations:
  • Different thickness ranges
  • Monochrome camera system
  • Vacuum chuck
  • Manual positioning (KV-300m)
  • SEMI S2 compliant

 

Foothill Instruments KV-300 Film Thickness Tool with vision for measuring transparent films of thickness up to 500 µm  

 

This is just a small sample of the products offered by Foothill Instruments.
Please contact your local TCG representative for more information.

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